• Scanner
Decoupled XY and Z-scanner Single module flexure XY-scanner with closed-loop control Scan range of XY-scanner: 5 μm, 50 μm, or 100 μm Working distance of Z-scanner: 12 μm or 25 μm
• Stage
Working range of XY stage: • 25 mm × 25 mm, motorized movement
Working range of Z stage: • 27.5 mm, motorized movement
Sample size: • Up to 100 mm × 100mm, 20 mm thick, and up to 500 g
• Head
Detection of cantilever deflection • Super Luminescent Diode (standard): 830 nm with low coherency • Laser Diode (option): 650 nm
Open side optical access • Accessible solid angle: 58° of cone angle
• Optics
Direct on-axis vision of sample surface and cantilever Focus range: 20 mm, motorized Magnification: 780× (optional 160×, 390×, or 1500×) Field of view: 480 μm × 360 μm
Optical resolution: 1 μm
• Electronics
High performance DSP: 600 MHz with 4800 MIPS Maximum 16 data images Maximum data size: 4096 × 4096 pixels Signal inputs: 20 channels of 16 bit ADC at 500 kHz sampling Signal outputs: 21 channels of 16 bit DAC at 500 kHz settling Synchronous signal: End-of-image, end-of-line, and end-of-pixel TTL signals Active Q control (optional)
Cantilever spring constant calibration (optional) CE Compliant Power: 120 W

  • Two independent, closed- loop XY and Z flexure scanners for sample and tip
  • Out of plane motion of less than 2 nm over entire scan range
  • Flat and linear XY scan of up to 100 μm x 100 μm with low residual bow
  • Up to 25 μm Z-scan by high force scanner
  • Accurate height measurements
  • Reduced drift rate of less than 0.5 nm/min